Fluorinated Engineering Fluid SM-40
Detail
It is a transparent, colorless, non-conductive, non-flammable, residue-free, thermally stable and chemically stable perfluorinated liquid.
It is highly suitable for various electronic single-phase and dual-phase heat transfer applications, including etching machines, ion implanters, testers, CVD and TFT manufacturing in the semiconductor market, etc.
Other applications include heat transfer in data centers, high-performance computing, power electronics, and avionics, etc.
Typical Properties
Properties | SM-40 Data |
Appearance | Clear, colorless liquid |
Boiling Point (1 atm) | 165 (℃) |
Pour Point | -57 (℃) |
Liquid Density | 1855 (kg/m 3) |
Kinematic Viscosity | 2.2 (cSt) |
Dielectric Strength | ＞40kV |
Global Warming Potential（GWP） | ~6000 |